General Book Search for "9780750305006"

Defect Recognition and Image Processing in Semiconductors 1997

Hardback
Published : Thursday 1 January 1998
ISBN : 9780750305006
Price : €497.25


Description

Presents an overview of techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This book addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. It investigates defects in layers and devices.



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