General Book Search for "9781447110620"

Plasma Charging Damage

Paperback
Published : Thursday 30 August 2012
ISBN : 9781447110620
Price : €210.59


Description

In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.



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