Run to Run Control in Semiconductor Man

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General Book Search for "9780849311789"

General Books
School Books

Run-to-Run Control in Semiconductor Manufacturing

Author : Arnon M. Hurwitz,James Moyne
Hardback
Published : Thursday 30 November 2000
ISBN : 9780849311789
Price : €198.90

Description

Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities.