3D IC Devices, Technologies, and ManufacturingAuthor :
Paperback
Published : Saturday 30 April 2016
Description
Discusses the advantages of 3D devices and their applications in dynamic random access memory (DRAM), 3D-NAND flash, and advanced-technology-node CMOS ICs. Topics include the development of DRAM cell transistors and storage node capacitors; the manufacturing process of advanced buried-word-line DRAM; scaling trends of CMOS logic; and devices that may be used in the "post-CMOS" era.
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