Handbook of Semiconductor Manufacturing Technology

Author : Robert Doering,Yoshio Nishi

Hardback

Published : Monday 9 July 2007

ISBN : 9781574446753

Price : €245.70

Description

A guide to the individual processes, equipment, and materials of semiconductor manufacturing technologies. It features chapters on silicon materials, SOI materials and devices, surface preparation, ion implantation, dopant diffusion, in-line metrology, yield modeling, photomask fabrication, failure analysis, and damascene copper electroplating.

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