Ion Implantation into Semiconductors, Oxides and Ceramics

Author : B.G. Svensson,P.L.F. Hemment

Hardback

Published : Monday 1 March 1999

ISBN : 9780080436135

Price : €163.80

Description

Includes proceedings which contain the papers presented at the Symposium on "Ion Implantation into Semiconductors, Oxides and Ceramics", which was held in France in 1998. The aim of the symposium was to provide a forum for the discussion of results in the implantation of materials from three different classes: semiconductors, oxides and ceramics.

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