MEMS: Field Models and Optimal Design

Author : Paolo Di Barba,Slawomir Wiak

Paperback

Published : Friday 14 August 2020

ISBN : 9783030214982

Price : €128.69

Description

This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models.

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