Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Author : Saburo Nonogaki,Ueno Takumi

Hardback

Published : Thursday 25 June 1998

ISBN : 9780824799519

Price : €280.80

Description

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

You may also like ...

Microlithography Fundamentals in Semico...

by Saburo Nonogaki,Ueno Takumi

Hardback

25 Jun 1998

Plastics and polymers

€280.80

Extended stock – Dispatch 5-7 days

New

Sexual Abuse and Education in Japan

by Robert O'Mochain,Yuki Ueno

Paperback

27 May 2024

Regional / International studies

€46.79

Extended stock – Dispatch 5-7 days

Philosophy of Education in Dialogue bet...

by Masamichi Ueno

Hardback

31 Jul 2023

Philosophy and theory of education

€157.95

Extended stock – Dispatch 5-7 days

Ikebana: The Zen Way of Flowers

by Yuji Ueno

Hardback

21 Mar 2023

Flower arranging and floral crafts

€29.24

Extended stock – Dispatch 5-7 days

Reviews